Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Changgeng Liu; Tianhong Cui; Zhaoying Zhou; Kun Lian; J. Goettert

doi:10.1109/SENSOR.2003.1217004

Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Changgeng Liu, Tianhong Cui, Zhaoying Zhou, Kun Lian, J. Goettert

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, while the coupling interactions dramatically damp the vibration amplitude of the transducer, the effects on the resonant frequencies of the structure are negligible, which is very important for further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

Original language	English (US)
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1271-1274
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1217004
State	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	6/8/03 → 6/12/03

Bibliographical note

Funding Information:
Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated.

Publisher Copyright:
© 2003 IEEE.

Keywords

Aerodynamics
Aerosols
Analytical models
Chemicals
Drug delivery
Etching
Instruments
Piezoelectric transducers
Resonant frequency
Silicon

Publisher link

10.1109/SENSOR.2003.1217004

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Liu, C., Cui, T., Zhou, Z., Lian, K., & Goettert, J. (2003). Fluid-structure coupling analysis and simulation of a micromachined piezo microjet. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1271-1274). Article 1217004 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217004

Fluid-structure coupling analysis and simulation of a micromachined piezo microjet. / Liu, Changgeng; Cui, Tianhong; Zhou, Zhaoying et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1271-1274 1217004 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liu, C, Cui, T, Zhou, Z, Lian, K & Goettert, J 2003, Fluid-structure coupling analysis and simulation of a micromachined piezo microjet. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1217004, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1271-1274, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1217004

Liu C, Cui T, Zhou Z, Lian K, Goettert J. Fluid-structure coupling analysis and simulation of a micromachined piezo microjet. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1271-1274. 1217004. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1217004

Liu, Changgeng ; Cui, Tianhong ; Zhou, Zhaoying et al. / Fluid-structure coupling analysis and simulation of a micromachined piezo microjet. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1271-1274 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

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abstract = "A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, while the coupling interactions dramatically damp the vibration amplitude of the transducer, the effects on the resonant frequencies of the structure are negligible, which is very important for further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.",

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note = "Funding Information: Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated. Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

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AU - Lian, Kun

AU - Goettert, J.

N1 - Funding Information: Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated. Publisher Copyright: © 2003 IEEE.

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AB - A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, while the coupling interactions dramatically damp the vibration amplitude of the transducer, the effects on the resonant frequencies of the structure are negligible, which is very important for further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

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Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Abstract

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