Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Changgeng Liu, Tianhong Cui, Zhaoying Zhou, Kun Lian, Jost Goettert

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations


A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, the coupling interactions dramatically damp the vibration amplitude of the transducer. However, the effects on the resonant frequencies of the structure are negligible, which will save much calculation work during further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

Original languageEnglish (US)
Pages (from-to)460-465
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number2-3
StatePublished - Sep 1 2004
EventSelected Papers from Transducers 03 - Boston, MA, United States
Duration: Jun 8 2003Jun 12 2003

Bibliographical note

Funding Information:
Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated.


  • Coupling analysis
  • Microjet
  • Micromachining
  • Simulation


Dive into the research topics of 'Fluid-structure coupling analysis and simulation of a micromachined piezo microjet'. Together they form a unique fingerprint.

Cite this