Microneedles are an important tool for promoting transdermal drug delivery, especially for macromolecular drugs. In this paper, the fabrication method of hollow hafnium oxide (HfO2) microneedles mainly based on deep reactive ion etching of silicon and atomic layer deposition of HfO2, and the finite element analysis of the microneedles based on ANSYS software are presented. The fabrication process is simplified by using only one mask. The finite element analysis of a single microneedle shows that the flexibility of the microneedles can be easily adjusted for various applications. The finite element analysis of a 3×3 HfO2 microneedle array applied on the skin explains the 'bed of nail' effect nicely, i.e., the skin is not liable to be pierced when the density of microneedles in array increases. The presented research work here provides useful information for design optimization of HfO2 microneedles.
|Original language||English (US)|
|Title of host publication||Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017|
|Editors||Song Qiu, Hongying Liu, Li Sun, Lipo Wang, Qingli Li, Mei Zhou|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||6|
|State||Published - Feb 22 2018|
|Event||10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017 - Shanghai, China|
Duration: Oct 14 2017 → Oct 16 2017
|Name||Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017|
|Other||10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017|
|Period||10/14/17 → 10/16/17|
Bibliographical noteFunding Information:
This work was supported by the open research fund of Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal University, China.
© 2017 IEEE.
Copyright 2018 Elsevier B.V., All rights reserved.
- Finite element analysis
- atomic layer deposition
- bed of nail effect
- micro-electro-mechanical systems
- transdermal drug delivery