Ferroelectric-based microactuators

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This paper reviews the current state of ferroelectric-based microactuators. The advantages of ferroelectric-based microactuation are considered. Several actuator concepts are discussed including unimorph-based cantilever actuators, membrane-based micropumps, linear positioning actuators using folded geometries of cascaded elementary actuators for both in-plane and out-of-plane displacements, linear stepper motors using inch-worm geometries, and ultrasonic-based micromotors. Optimistic, order-of-magnitude estimates of actuator performance are given based on simple, idealized analysis. Processing issues in fabricating ferroelectric-based microactuators are also considered.

Original languageEnglish (US)
Pages (from-to)179-190
Number of pages12
JournalIntegrated Ferroelectrics
Issue number1-4
StatePublished - Nov 1995

Bibliographical note

Funding Information:
This work was partially supported by the National Science Foundation (grant number NSFEID-9212159).


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