@inproceedings{ddbe96b9b5f644859c019fc9d46b71c3,
title = "Fabrication of suspended graphene temperature sensors using anodic aluminum oxide",
abstract = "In this paper, we present the suspended graphene temperature sensor using an AAO substrate. Recently, there are several reports for the fabrication of graphene thermal sensor using nanofabrication techniques. However, it needs to be improved for a higher sensitivity. Here, we use the Anodic Aluminum Oxide (AAO) substrate for the suspended graphene. Graphene is transferred to the AAO substrate and the glass substrate to compare the results. The transferred graphene is located between two Au electrodes. The Au electrodes are deposited by sputtering, and the resistance of the graphene is measured. Finally, we successfully show the increasement of the sensitivity.",
keywords = "AAO, Graphene, Resistance, Temperature",
author = "Jungyoon Kim and Tianhong Cui",
year = "2018",
month = jan,
day = "1",
language = "English (US)",
series = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018",
publisher = "Chemical and Biological Microsystems Society",
pages = "798--800",
booktitle = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018",
note = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 ; Conference date: 11-11-2018 Through 15-11-2018",
}