Fabrication of suspended graphene temperature sensors using anodic aluminum oxide

Jungyoon Kim, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, we present the suspended graphene temperature sensor using an AAO substrate. Recently, there are several reports for the fabrication of graphene thermal sensor using nanofabrication techniques. However, it needs to be improved for a higher sensitivity. Here, we use the Anodic Aluminum Oxide (AAO) substrate for the suspended graphene. Graphene is transferred to the AAO substrate and the glass substrate to compare the results. The transferred graphene is located between two Au electrodes. The Au electrodes are deposited by sputtering, and the resistance of the graphene is measured. Finally, we successfully show the increasement of the sensitivity.

Original languageEnglish (US)
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages798-800
Number of pages3
ISBN (Electronic)9781510897571
StatePublished - Jan 1 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan, Province of China
Duration: Nov 11 2018Nov 15 2018

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume2

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
CountryTaiwan, Province of China
CityKaohsiung
Period11/11/1811/15/18

Keywords

  • AAO
  • Graphene
  • Resistance
  • Temperature

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