Fabrication of submicron wire networks using electron beam lithography

Richard J. Bojko, Richard Tiberio, Brian Whitehead, Allen M. Goldman, James Gordon, Fang Yu, Paul M. Chaikin, Carlos Wilks, Mark Itzler

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

Original languageEnglish (US)
Pages (from-to)31-34
Number of pages4
JournalMicroelectronic Engineering
Volume11
Issue number1-4
DOIs
StatePublished - Apr 1990

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