Fabrication of submicron wire networks using electron beam lithography

Richard J. Bojko; Richard Tiberio; Brian Whitehead; Allen M. Goldman; James Gordon; Fang Yu; Paul M. Chaikin; Carlos Wilks; Mark Itzler

doi:10.1016/0167-9317(90)90067-4

Fabrication of submicron wire networks using electron beam lithography

Richard J. Bojko, Richard Tiberio, Brian Whitehead, Allen M. Goldman, James Gordon, Fang Yu, Paul M. Chaikin, Carlos Wilks, Mark Itzler

Physics and Astronomy (Twin Cities)

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

Original language	English (US)
Pages (from-to)	31-34
Number of pages	4
Journal	Microelectronic Engineering
Volume	11
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(90)90067-4
State	Published - Apr 1990

Access

10.1016/0167-9317(90)90067-4

Fingerprint Dive into the research topics of 'Fabrication of submicron wire networks using electron beam lithography'. Together they form a unique fingerprint.

Cite this

@article{e4558a7de99149bc9ef161fe1fc1d5bc,

title = "Fabrication of submicron wire networks using electron beam lithography",

abstract = "We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.",

author = "Bojko, {Richard J.} and Richard Tiberio and Brian Whitehead and Goldman, {Allen M.} and James Gordon and Fang Yu and Chaikin, {Paul M.} and Carlos Wilks and Mark Itzler",

year = "1990",

month = apr,

doi = "10.1016/0167-9317(90)90067-4",

language = "English (US)",

volume = "11",

pages = "31--34",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Fabrication of submicron wire networks using electron beam lithography

AU - Bojko, Richard J.

AU - Tiberio, Richard

AU - Whitehead, Brian

AU - Goldman, Allen M.

AU - Gordon, James

AU - Yu, Fang

AU - Chaikin, Paul M.

AU - Wilks, Carlos

AU - Itzler, Mark

PY - 1990/4

Y1 - 1990/4

N2 - We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

AB - We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

UR - http://www.scopus.com/inward/record.url?scp=0025413691&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025413691&partnerID=8YFLogxK

U2 - 10.1016/0167-9317(90)90067-4

DO - 10.1016/0167-9317(90)90067-4

M3 - Article

AN - SCOPUS:0025413691

VL - 11

SP - 31

EP - 34

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 1-4

ER -