Fabrication of smooth patterned structures of refractory metals, semiconductors, and oxides via template stripping

Jong Hyuk Park, Prashant Nagpal, Kevin M. McPeak, Nathan C. Lindquist, Sang Hyun Oh, David J. Norris

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


The template-stripping method can yield smooth patterned films without surface contamination. However, the process is typically limited to coinage metals such as silver and gold because other materials cannot be readily stripped from silicon templates due to strong adhesion. Herein, we report a more general template-stripping method that is applicable to a larger variety of materials, including refractory metals, semiconductors, and oxides. To address the adhesion issue, we introduce a thin gold layer between the template and the deposited materials. After peeling off the combined film from the template, the gold layer can be selectively removed via wet etching to reveal a smooth patterned structure of the desired material. Further, we demonstrate template-stripped multilayer structures that have potential applications for photovoltaics and solar absorbers. An entire patterned device, which can include a transparent conductor, semiconductor absorber, and back contact, can be fabricated. Since our approach can also produce many copies of the patterned structure with high fidelity by reusing the template, a low-cost and high-throughput process in micro- and nanofabrication is provided that is useful for electronics, plasmonics, and nanophotonics.

Original languageEnglish (US)
Pages (from-to)9701-9708
Number of pages8
JournalACS Applied Materials and Interfaces
Issue number19
StatePublished - Oct 18 2013


  • oxides
  • photovoltaics
  • refractory metals
  • template stripping
  • thermophotovoltaics

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