Abstract
Layer-by-layer self-assembled thin films made of indium nanoparticles have been investigated as conductive materials to fabricate resistors. The functional resistors degrade as the current passes through the devices. However, it tends to be stable at some acceptable values. The rapid thermal annealing has a significant effect on the electrical characteristics of this thin film. The resistivity before annealing was 2.4×105 Ωcm, and it was reduced dramatically after annealing to about 0.9 Ωcm.
Original language | English (US) |
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Pages (from-to) | 2085-2088 |
Number of pages | 4 |
Journal | Solid-State Electronics |
Volume | 47 |
Issue number | 11 |
DOIs | |
State | Published - Nov 1 2003 |
Keywords
- Indium
- Layer-by-layer self-assembly
- Resistivity
- Resistor