Fabrication of indium resistors by layer-by-layer nanoassembly and microlithography techniques

Jingshi Shi, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Layer-by-layer self-assembled thin films made of indium nanoparticles have been investigated as conductive materials to fabricate resistors. The functional resistors degrade as the current passes through the devices. However, it tends to be stable at some acceptable values. The rapid thermal annealing has a significant effect on the electrical characteristics of this thin film. The resistivity before annealing was 2.4×105 Ωcm, and it was reduced dramatically after annealing to about 0.9 Ωcm.

Original languageEnglish (US)
Pages (from-to)2085-2088
Number of pages4
JournalSolid-State Electronics
Volume47
Issue number11
DOIs
StatePublished - Nov 1 2003

Keywords

  • Indium
  • Layer-by-layer self-assembly
  • Resistivity
  • Resistor

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