Fabrication of indium resistors by layer-by-layer nanoassembly and microlithography techniques

Jingshi Shi, Tianhong Cui

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Layer-by-layer self-assembled thin films made of indium nanoparticles have been investigated as conductive materials to fabricate resistors. The functional resistors degrade as the current passes through the devices. However, it tends to be stable at some acceptable values. The rapid thermal annealing has a significant effect on the electrical characteristics of this thin film. The resistivity before annealing was 2.4×105 Ωcm, and it was reduced dramatically after annealing to about 0.9 Ωcm.

Original languageEnglish (US)
Pages (from-to)2085-2088
Number of pages4
JournalSolid-State Electronics
Volume47
Issue number11
DOIs
StatePublished - Nov 1 2003

Fingerprint

Indium
resistors
Resistors
Lithography
indium
Annealing
Fabrication
Conductive materials
Thin films
fabrication
annealing
Rapid thermal annealing
thin films
Nanoparticles
nanoparticles
electrical resistivity

Keywords

  • Indium
  • Layer-by-layer self-assembly
  • Resistivity
  • Resistor

Cite this

Fabrication of indium resistors by layer-by-layer nanoassembly and microlithography techniques. / Shi, Jingshi; Cui, Tianhong.

In: Solid-State Electronics, Vol. 47, No. 11, 01.11.2003, p. 2085-2088.

Research output: Contribution to journalArticle

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