Fabrication of indium resistors by layer-by-layer nanoassembly and microlithography techniques

Jingshi Shi; Tianhong Cui

doi:10.1016/S0038-1101(03)00262-4

Fabrication of indium resistors by layer-by-layer nanoassembly and microlithography techniques

Jingshi Shi, Tianhong Cui

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Layer-by-layer self-assembled thin films made of indium nanoparticles have been investigated as conductive materials to fabricate resistors. The functional resistors degrade as the current passes through the devices. However, it tends to be stable at some acceptable values. The rapid thermal annealing has a significant effect on the electrical characteristics of this thin film. The resistivity before annealing was 2.4×10⁵ Ωcm, and it was reduced dramatically after annealing to about 0.9 Ωcm.

Original language	English (US)
Pages (from-to)	2085-2088
Number of pages	4
Journal	Solid-State Electronics
Volume	47
Issue number	11
DOIs	https://doi.org/10.1016/S0038-1101(03)00262-4
State	Published - Nov 1 2003

Keywords

Indium
Layer-by-layer self-assembly
Resistivity
Resistor

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10.1016/S0038-1101(03)00262-4

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abstract = "Layer-by-layer self-assembled thin films made of indium nanoparticles have been investigated as conductive materials to fabricate resistors. The functional resistors degrade as the current passes through the devices. However, it tends to be stable at some acceptable values. The rapid thermal annealing has a significant effect on the electrical characteristics of this thin film. The resistivity before annealing was 2.4×105 Ωcm, and it was reduced dramatically after annealing to about 0.9 Ωcm.",

keywords = "Indium, Layer-by-layer self-assembly, Resistivity, Resistor",

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KW - Resistor

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