Fabrication of bio inspired inorganic nanocilia sensors

Matthew A. Hein, Mazin M. Maqableh, Michael J. Delahunt, Mark Tondra, Alison B. Flatau, Carol K. Shield, Bethanie J.H. Stadler

Research output: Contribution to journalArticlepeer-review

28 Scopus citations


In nature, microscale hair-like projections called cilia are used ubiquitously for both sensing and motility. In this paper, biomimetic nanoscale cilia arrays have been fabricated through templated growth of Co in anodized aluminum oxide. The motion of arrays of Co cilia was then detected using magnetic sensors. These signals were used to prove the feasibility of two types of sensors: flow sensors and vibration sensors. The flow sensors were tested in a microfluidic channel. They showed the ability to detect flows from 0.5 ml/min to 6 ml/min with a signal to noise (SNR) of 44 using only 140 μW of power and no amplification. The vibration sensors were tested using a shake table in the low earthquake-like frequency range of 1-5 Hz. The vibration response was a mW signal at twice the frequency of the shake table.

Original languageEnglish (US)
Article number6392379
Pages (from-to)191-196
Number of pages6
JournalIEEE Transactions on Magnetics
Issue number1
StatePublished - 2013


  • Artificial cilia
  • bidirectional flow sensor
  • biomimetic
  • cilia
  • lab on a chip
  • magnetic nanowire
  • microfluidics
  • nanowires
  • vibration measurement


Dive into the research topics of 'Fabrication of bio inspired inorganic nanocilia sensors'. Together they form a unique fingerprint.

Cite this