Fingerprint
Dive into the research topics of 'Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology
Kevin Roberts, Fred Williamson, Greg Cibuzar, Lowell Thomas
Research output: Contribution to journal › Conference article › peer-review
9
Scopus
citations