Fingerprint
Dive into the research topics of 'Fabrication methods for improved electromechanical behavior in piezoelectric membranes'. Together they form a unique fingerprint.
Engineering & Materials Science
Residual stresses
Membranes
Fabrication
Trenching
Electromechanical coupling
Composite materials
Lead titanate
Electrodes
Silicon oxides
Piezoelectric materials
Stretching
Composite structures
Tensile stress
MEMS
Silicon
Geometry
Physics & Astronomy
residual stress
membranes
fabrication
composite materials
lead titanates
electrodes
composite structures
electric power
silicon oxides
tensile stress
microbalances
microelectromechanical systems
routes
boundary conditions
geometry
configurations
silicon
performance
Chemical Compounds
Residual stresses
Membranes
Trenching
Lead zirconate titanate
Composite materials
Electrodes
Silicon oxides
Piezoelectric materials
Stretching
Composite structures
Tensile stress
MEMS
Boundary conditions
Geometry