Fingerprint
Dive into the research topics of 'Fabrication and characterization of the piezoelectric microcantilever integrated with PZT thin-film microforce sensor and actuator'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Fabrication and characterization of the piezoelectric microcantilever integrated with PZT thin-film microforce sensor and actuator
Mengwei Liu, Tianhong Cui, Liding Wang
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Scopus
citations