Fabrication and characterization of the piezoelectric microcantilever integrated with PZT thin-film microforce sensor and actuator

Mengwei Liu, Tianhong Cui, Liding Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The paper presents a technology platform for micromanipulation systems based on the piezoelectric cantilevers integrated with PZT thin-film microforce sensors and actuators. Two novel piezoelectric microcantilevers with two-segment and bimoroh sol-gel PZT films were designed, fabricated by bulk micromachining and tested. The sensing and actuation capability of two-segment PZT microcantilevers as microforce sensors or actuators was characterized. The sensing performance of bimorph PZT microcantilevers was compared with the conventional unimorph micro cantilever. The piezoelectric constant d3 of PZT films were measured without poling process.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2255-2258
Number of pages4
DOIs
StatePublished - 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • Microactuator
  • Microsensor
  • PZT thin film
  • Piezoelectric microcantilever

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