Fabrication and characterization of suspended single-walled carbon nantoubes composite beams

Keyphrases

• Micropatterning 100%
• Single-walled 100%
• Composite Beam 100%
• Microbeam 100%
• Single-walled Carbon Nanotubes (SWCNTs) 100%
• CNT/polymer Composite 100%
• Oxides 50%
• Sacrificial Layer 50%
• Mask Layer 50%
• Layer-by-layer Assembly 50%
• Oxygen Plasma 50%
• Substrate Effect 50%
• NEMS Devices 50%
• Photoresist 50%
• Hydrofluoric Acid 50%
• I-V Measurement 50%
• Exposed Area 50%
• Organized Structure 50%
• Spring Constant 50%
• Suspension Beam 50%
• Physical Sensors 50%
• High Young's Modulus 50%
• Nanoswitch 50%
• Variation in Thickness 50%
• Acid Vapor 50%

Engineering

• Single-Walled Carbon Nanotube 100%
• Composite Beam 100%
• Polymers 100%
• Young's Modulus 50%
• Potential Application 50%
• Spring Constant 50%
• Feature Size 50%
• Physical Sensor 50%
• Photoresist 50%

Material Science

• Polymer Composite 100%
• Carbon Nanotubes 100%
• Young's Modulus 50%
• Oxide Compound 50%