TY - GEN
T1 - Fabrication and characterization of suspended single-walled carbon nantoubes composite beams
AU - Lee, Dongjin
AU - Cui, Tianhong
PY - 2010
Y1 - 2010
N2 - We report the fabrication and characterization of single-walled carbon nanotube (SWCNT) multilayer micropatterns and suspended micro-beams prepared by layer-by-layer (LbL) assembly. The SWCNT multilayer is etched using oxygen plasma with the masking layer of the photoresist, resulting in the feature size of 2 urn. Furthermore, it is released by etching a sacrificial layer of oxide in the hydrofluoric acid vapor. I-V measurements reveal that the resistance of suspended beams decreases upon release due to the exposed surface, excluding the effects of substrate. A high Young's modulus has been found on the range of 500-800 GPa due to the deviation of spring constants measured and the variation in thickness of beams. It is much higher than those of the other CNT-polymer composites due to the organized structure. Stiff CNT-polymer composite micropatterns and the suspended micro-beams may have potential applications for novel physical sensors, nano-switches, other M/NEMS devices, etc.
AB - We report the fabrication and characterization of single-walled carbon nanotube (SWCNT) multilayer micropatterns and suspended micro-beams prepared by layer-by-layer (LbL) assembly. The SWCNT multilayer is etched using oxygen plasma with the masking layer of the photoresist, resulting in the feature size of 2 urn. Furthermore, it is released by etching a sacrificial layer of oxide in the hydrofluoric acid vapor. I-V measurements reveal that the resistance of suspended beams decreases upon release due to the exposed surface, excluding the effects of substrate. A high Young's modulus has been found on the range of 500-800 GPa due to the deviation of spring constants measured and the variation in thickness of beams. It is much higher than those of the other CNT-polymer composites due to the organized structure. Stiff CNT-polymer composite micropatterns and the suspended micro-beams may have potential applications for novel physical sensors, nano-switches, other M/NEMS devices, etc.
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U2 - 10.1115/IMECE2009-12834
DO - 10.1115/IMECE2009-12834
M3 - Conference contribution
AN - SCOPUS:77954282000
SN - 9780791843857
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 885
EP - 891
BT - Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Y2 - 13 November 2009 through 19 November 2009
ER -