Fabrication and characterization of suspended single-walled carbon nantoubes composite beams

Dongjin Lee, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report the fabrication and characterization of single-walled carbon nanotube (SWCNT) multilayer micropatterns and suspended micro-beams prepared by layer-by-layer (LbL) assembly. The SWCNT multilayer is etched using oxygen plasma with the masking layer of the photoresist, resulting in the feature size of 2 urn. Furthermore, it is released by etching a sacrificial layer of oxide in the hydrofluoric acid vapor. I-V measurements reveal that the resistance of suspended beams decreases upon release due to the exposed surface, excluding the effects of substrate. A high Young's modulus has been found on the range of 500-800 GPa due to the deviation of spring constants measured and the variation in thickness of beams. It is much higher than those of the other CNT-polymer composites due to the organized structure. Stiff CNT-polymer composite micropatterns and the suspended micro-beams may have potential applications for novel physical sensors, nano-switches, other M/NEMS devices, etc.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages885-891
Number of pages7
EditionPART B
ISBN (Print)9780791843857
DOIs
StatePublished - Jan 1 2010
EventASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: Nov 13 2009Nov 19 2009

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
NumberPART B
Volume12

Other

OtherASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Country/TerritoryUnited States
CityLake Buena Vista, FL
Period11/13/0911/19/09

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