Experimental technique for fatigue testing of MEMS in liquids

Engineering

• Experimental Technique 100%
• Fatigue Life 33%
• Fatigue Testing 100%
• Mechanical Fatigue Test 33%
• Micro-Electro-Mechanical System 100%
• Saline Solution 33%
• Tensile Specimen 33%
• Tensiles 66%

Keyphrases

• 6-cycles 33%
• Alternating Stress 33%
• Bulk Micromachining 33%
• Equal Values 33%
• Fatigue Life 33%
• Fatigue Testing 100%
• Liquid Environment 33%
• Micro-electro-mechanical Systems 100%
• Saline Solution 33%
• Tensile Fatigue Test 33%
• Tensile Specimen 33%

Material Science

• Aluminum 33%
• Fatigue of Materials 33%
• Microelectromechanical System 100%