An experimental technique for the fatigue testing of micro- electromechanical systems (MEMS) in liquid environments is described in this paper. A bulk-micromachined MEMS tensile specimen with integral grips was fabricated, and tensile-tensile fatigue tests were performed in air and in a saline solution. The fatigue life of the 200-nm thick aluminum specimen was observed to range from 1.2 × 10 6 to 2.2 × 10 6 cycles when tested at equal values of the mean and alternating stresses of 0.13 GPa.
Bibliographical noteFunding Information:
Manuscript received August 23, 2011; accepted November 16, 2011. Date of publication February 10, 2012; date of current version May 28, 2012. This work was supported in part by the National Science Foundation under Award Number CMS-0300125. Subject Editor C. Mastrangelo.
- microelectromechanical systems (MEMS)
- thin film