Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon-silane capacitive radio-frequency plasmas

Zhe Shen; Uwe Kortshagen

doi:10.1116/1.1427894

Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon-silane capacitive radio-frequency plasmas

Zhe Shen, Uwe Kortshagen

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

The electrical parameters of an argon-silane rf discharge were analyzed experimentally and compared with those of a pristine argon discharge. Experiments show that the presence of nanometer-sized particles in plasma causes changes of all electrical parameters which are more pronounced if higher Fourier harmonics are considered.

Original language	English (US)
Pages (from-to)	153-159
Number of pages	7
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	20
Issue number	1
DOIs	https://doi.org/10.1116/1.1427894
State	Published - Jan 2002

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Copyright 2008 Elsevier B.V., All rights reserved.

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abstract = "The electrical parameters of an argon-silane rf discharge were analyzed experimentally and compared with those of a pristine argon discharge. Experiments show that the presence of nanometer-sized particles in plasma causes changes of all electrical parameters which are more pronounced if higher Fourier harmonics are considered.",

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Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon-silane capacitive radio-frequency plasmas

Abstract

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