Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition

J. Blum, A. Neuman, N. Tymiak, N. P. Rao, S. L. Girshick, J. V.R. Heberlein, W. Gerberich, P. H. McMurry

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)S77-S78
JournalJournal of Aerosol Science
Issue numberSUPPL 1
StatePublished - Sep 1998


  • Hypersonic Impaction
  • Nanoparticles
  • Nanostructured Materials
  • Plasma Synthesis

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