Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition

J. Blum; A. Neuman; N. Tymiak; N. P. Rao; S. L. Girshick; J. V.R. Heberlein; W. Gerberich; P. H. McMurry

doi:10.1016/S0021-8502(98)00121-9

Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition

J. Blum, A. Neuman, N. Tymiak, N. P. Rao, S. L. Girshick, J. V.R. Heberlein, W. Gerberich, P. H. McMurry

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	S77-S78
Journal	Journal of Aerosol Science
Volume	29
Issue number	SUPPL 1
DOIs	https://doi.org/10.1016/S0021-8502(98)00121-9
State	Published - Sep 1998

Keywords

Hypersonic Impaction
Nanoparticles
Nanostructured Materials
Plasma Synthesis

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10.1016/S0021-8502(98)00121-9

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@article{9855c93568a74294a508ffaf5d018a9f,

title = "Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition",

keywords = "Hypersonic Impaction, Nanoparticles, Nanostructured Materials, Plasma Synthesis",

author = "J. Blum and A. Neuman and N. Tymiak and Rao, {N. P.} and Girshick, {S. L.} and Heberlein, {J. V.R.} and W. Gerberich and McMurry, {P. H.}",

year = "1998",

month = sep,

doi = "10.1016/S0021-8502(98)00121-9",

language = "English (US)",

volume = "29",

pages = "S77--S78",

journal = "Journal of Aerosol Science",

issn = "0021-8502",

publisher = "Elsevier Limited",

number = "SUPPL 1",

}

TY - JOUR

T1 - Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition

AU - Blum, J.

AU - Neuman, A.

AU - Tymiak, N.

AU - Rao, N. P.

AU - Girshick, S. L.

AU - Heberlein, J. V.R.

AU - Gerberich, W.

AU - McMurry, P. H.

PY - 1998/9

Y1 - 1998/9

KW - Hypersonic Impaction

KW - Nanoparticles

KW - Nanostructured Materials

KW - Plasma Synthesis

UR - http://www.scopus.com/inward/record.url?scp=0040712133&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0040712133&partnerID=8YFLogxK

U2 - 10.1016/S0021-8502(98)00121-9

DO - 10.1016/S0021-8502(98)00121-9

M3 - Article

AN - SCOPUS:0040712133

SN - 0021-8502

VL - 29

SP - S77-S78

JO - Journal of Aerosol Science

JF - Journal of Aerosol Science

IS - SUPPL 1

ER -

Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition

Keywords

Publisher link

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