Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

U. Kortshagen; B. Heil

doi:10.1063/1.1289905

Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

U. Kortshagen, B. Heil

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.

Original language	English (US)
Pages (from-to)	1265-1267
Number of pages	3
Journal	Applied Physics Letters
Volume	77
Issue number	9
DOIs	https://doi.org/10.1063/1.1289905
State	Published - Aug 28 2000

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10.1063/1.1289905

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@article{bda4ea1b4ea44187aa4488f80cd52d08,

title = "Experimental observation of a {"}convective cell{"} in electron phase space in an inductively coupled radio-frequency plasma",

abstract = "Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a {"}convection cell{"} in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.",

author = "U. Kortshagen and B. Heil",

year = "2000",

month = aug,

day = "28",

doi = "10.1063/1.1289905",

language = "English (US)",

volume = "77",

pages = "1265--1267",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "9",

}

TY - JOUR

T1 - Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

AU - Kortshagen, U.

AU - Heil, B.

PY - 2000/8/28

Y1 - 2000/8/28

N2 - Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.

AB - Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons.

UR - http://www.scopus.com/inward/record.url?scp=0005755658&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0005755658&partnerID=8YFLogxK

U2 - 10.1063/1.1289905

DO - 10.1063/1.1289905

M3 - Article

AN - SCOPUS:0005755658

SN - 0003-6951

VL - 77

SP - 1265

EP - 1267

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 9

ER -

Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma

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