Experimental model and ic-process design of a nanometer linear piezoelectric stepper motor

Jack W. Judy, Dennis L. Polla, William P Robbins

Research output: Contribution to conferencePaper

1 Scopus citations

Abstract

A linear stepper motor capable of sub-micrometer controlled movement, or nano-actuation, has been constructed using the piezoelectric material lead-zirconate-titanate (PZT). This prototype device consists of a piezoelectric driving element measuring 25.4 mm × 12.7 mm × 1.6 mm. This device is inset in a trench to constrain motion to one dimension. An electrode on the bottom of the glider is used with an electrode on the top of the trench to implement an electrostatic clamp. A linear inertial sliding motion can be achieved by rapidly expanding or contracting the piezoelectric bar which is connected between a glider and an attached base. Glider velocities of 5.7 - 476 μm/s were measured by timing the movement of the glider over a 1.0 mm portion of the track through an optical microscope. Displacement steps of 70 - 1100 nm were calculated.

Original languageEnglish (US)
Pages11-17
Number of pages7
StatePublished - Dec 1 1990
EventWinter Annual Meeting of the American Society of Mechanical Engineers - Dallas, TX, USA
Duration: Nov 25 1990Nov 30 1990

Other

OtherWinter Annual Meeting of the American Society of Mechanical Engineers
CityDallas, TX, USA
Period11/25/9011/30/90

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    Judy, J. W., Polla, D. L., & Robbins, W. P. (1990). Experimental model and ic-process design of a nanometer linear piezoelectric stepper motor. 11-17. Paper presented at Winter Annual Meeting of the American Society of Mechanical Engineers, Dallas, TX, USA, .