Experimental and numerical results for airflow and particle transport in a microelectronics clean room

T. H. Kuehn, David Y Pui, J. P. Gratzek

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

This paper presents experimental measurements of time-averaged air velocities, turbulence intensity, and turbulent frequency distribution near an exhausts bench located in a Class 10 side-wall exhaust, tunnel-type clean room. Particle concentration data were also obtained from four particle-source locations using PSL particles of 0.357 and 1.09 micron diameter. A variety of two-dimensional numerical solutions have been obtained for this configuration. Quantitative comparisons are given for time-averaged airflow velocity magnitude and direction and particle concentration. The good agreement between the measured and computed velocity results shows that numerical models can accurately predict the flow pattern in this configuration. However, the particle concentration agreement is not as good.

Original languageEnglish (US)
Pages (from-to)940-950
Number of pages11
JournalASHRAE Transactions
Volume98
Issue numberpt 1
StatePublished - Dec 1 1992

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