Erratum: Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors (Appl. Phys. Lett. (2002) 80 (1580))

T. C. Shen, J. Y. Ji, M. A. Zudov, R. R. Du, J. S. Kline, J. R. Tucker

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish (US)
Pages (from-to)3231
Number of pages1
JournalApplied Physics Letters
Volume80
Issue number17
DOIs
StatePublished - Apr 29 2002

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