Erratum: Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors (Appl. Phys. Lett. (2002) 80 (1580))

T. C. Shen, J. Y. Ji, M. A. Zudov, R. R. Du, J. S. Kline, J. R. Tucker

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish (US)
Pages (from-to)3231
Number of pages1
JournalApplied Physics Letters
Issue number17
StatePublished - Apr 29 2002

Bibliographical note

Copyright 2011 Elsevier B.V., All rights reserved.

Cite this