@article{6160f817d3a84f699aa853d078ee733a,
title = "Erratum: Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors (Appl. Phys. Lett. (2002) 80 (1580))",
author = "Shen, {T. C.} and Ji, {J. Y.} and Zudov, {M. A.} and Du, {R. R.} and Kline, {J. S.} and Tucker, {J. R.}",
note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",
year = "2002",
month = apr,
day = "29",
doi = "10.1063/1.1476066",
language = "English (US)",
volume = "80",
pages = "3231",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "17",
}