A study on preparation of FePt magnetic thin films sputtered on Cu (001) was presented. The fct L10 ordered FePt (200)(001)in-plane Cu (002)(100) epitaxial relationship was observed using high-resolution x-ray scattering. The structure of the films was investigated using high-resolution (HR) x-ray scattering which showed a schematic illustration of the experimental x-ray scattering geometry. It was found that the L10 ordered FePt film sputtered at 400°C with well-controlled easy-axis distribution, small grain size and high in-plane coercivity was a potential candidate for ultrahigh-density longitudinal magnetic recording media.
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