Encapsulation of low-refractive-index SiO₂ nanorods by Al ₂O₃ with atomic layer deposition

Keyphrases

• Silica 100%
• Atomic Layer Deposition 100%
• Aluminum Oxide 100%
• Low Refractive Index 100%
• SiO2 Nanorods 100%
• Material Properties 50%
• Nanoporous 50%
• Optical Coatings 50%
• Refractive Index 50%
• Coefficient of Thermal Expansion 50%
• Distributed Bragg Reflector 50%
• Mechanical Stability 50%
• High Porosity 50%
• Low Refractive Index Materials 50%
• Optical Stability 50%
• Reflector Design 50%
• Humid Atmosphere 50%

Material Science

• Film 100%
• Refractive Index 100%
• Nanorods 100%
• Materials Property 33%
• Aluminum Oxide 33%
• Thermal Expansion 33%
• Mechanical Stability 33%
• Thin Films 33%
• Optical Coating 33%