Emission measurement and safety assessment for the production process of silicon nanoparticles in a pilot-scale facility

Jing Wang, Christof Asbach, Heinz Fissan, Tim Hülser, Heinz Kaminski, Thomas A.J. Kuhlbusch, David Y.H. Pui

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

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Keyphrases

Engineering

Chemical Engineering