Ellipsometric characterization of multi-component thin films: Determination of elemental content from optical dispersion

Keyphrases

• Elemental Content 100%
• Multicomponent Film 100%
• Optical Dispersion 100%
• Pb(Zr,Ti)O3 50%
• Gladstone-Dale 50%
• Electron Probe Microanalyzer 25%
• Elemental Composition 25%
• Perovskite 25%
• Stoichiometry 25%
• Optical Properties 25%
• Thin Systems 25%
• Polarizability 25%
• Energy Dispersive X-ray Analysis 25%
• Extinction Coefficient 25%
• Tauc 25%
• Semi-empirical Methods 25%
• Crystalline Compounds 25%
• Dispersion Properties 25%
• Electronic Polarizability 25%
• Urbach 25%
• Average Refractive Index 25%
• Tolerance Factor 25%
• Wavelength Dispersion 25%
• Index Coefficients 25%
• Variable Angle Spectroscopic Ellipsometry 25%
• Complex Perovskite 25%
• Octahedral Factor 25%
• Optical Mineralogy 25%
• Refractive Index Dispersion 25%
• Ferroelectric Thin Film 25%
• Perovskite Ferroelectrics 25%
• Wemple-DiDomenico Model 25%

Engineering

• Thin Films 100%
• Refractive Index 33%
• Refractivity 33%
• Fits and Tolerances 16%
• Model System 16%
• Elemental Composition 16%
• Dispersion Wavelength 16%
• Polarizability 16%
• Extinction Coefficient 16%
• Energy-Dispersive X-Ray Analysis 16%
• Complex Perovskites 16%
• Electronic Polarizability 16%
• Reaction Stoichiometry 16%

Material Science

• Thin Films 100%
• Refractive Index 40%
• Density 20%
• Electron Microprobe 20%
• Optical Property 20%
• Energy Dispersive X Ray Analysis 20%
• Ferroelectric Thin Films 20%