Electron energy distribution function in a microwave discharge created by propagating surface waves

U. Kortshagen, A. Shivarova, E. Tatarova, D. Zamfirov

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

The kinetics of plasmas sustained by surface wave propagation at a frequency 2375 MHz in argon gas are studied experimentally. A simple manner for estimating the plasma parameters on the basis of general relations is given. The measured electron energy distribution functions are compared to numerical results from a kinetic modelling of surface wave produced plasma. Good agreement is found. By averaging over the measured electron energy distribution functions, the plasma macroscopic parameters (electron density and temperature, as well as frequencies of different processes initiated by electron impact) are obtained.

Original languageEnglish (US)
Pages (from-to)301-311
Number of pages11
JournalJournal of Physics D: Applied Physics
Volume27
Issue number2
DOIs
StatePublished - Feb 14 1994

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