The kinetics of plasmas sustained by surface wave propagation at a frequency 2375 MHz in argon gas are studied experimentally. A simple manner for estimating the plasma parameters on the basis of general relations is given. The measured electron energy distribution functions are compared to numerical results from a kinetic modelling of surface wave produced plasma. Good agreement is found. By averaging over the measured electron energy distribution functions, the plasma macroscopic parameters (electron density and temperature, as well as frequencies of different processes initiated by electron impact) are obtained.
|Original language||English (US)|
|Number of pages||11|
|Journal||Journal of Physics D: Applied Physics|
|State||Published - Feb 14 1994|