Electron-beam-induced damage in wurtzite InN

K. A. Mkhoyan, J. Silcox

Research output: Contribution to journalArticlepeer-review

30 Scopus citations


The knock-on type damage with ejection of nitrogen atoms from a sample that was observed in wurtzite InN during irradiation by 100 keV electron beam was discussed. The wurtzite InN was grown by conventional molecular beam epitaxy on a sapphire substrate. Results were used to predict the damage that can occur in InN specimens of varying thicknesses.

Original languageEnglish (US)
Pages (from-to)859-861
Number of pages3
JournalApplied Physics Letters
Issue number6
StatePublished - Feb 10 2003


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