Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption

D. L. Olynick, B. Cord, A. Schipotinin, D. F. Ogletree, P. J. Schuck

Research output: Contribution to journal › Article › peer-review

48 Scopus citations

Fingerprint

Dive into the research topics of 'Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption'. Together they form a unique fingerprint.

Keyphrases

Engineering

Chemistry

Material Science