Electromigration effects in power grids characterized using an on-chip test structure with poly heaters and voltage tapping points

Keyphrases

• Power Grid 100%
• On-chip Test 100%
• Poly Heater 100%
• Tapping Point 100%
• Electromigration Effect 100%
• Transistor 33%
• On chip 33%
• Current-voltage 33%
• Electromigration 33%
• Self-healing 33%
• Current Path 33%
• Metal Layer 33%
• Mechanical Stress 33%
• Stress Dependence 33%
• Constant Current 33%
• Intersection Point 33%
• Constant Voltage Mode 33%
• Die Temperature 33%
• Dependent Failure 33%
• Chip Package 33%
• Failure Location 33%
• Transmission Gate 33%

Engineering

• Electromigration 100%
• Power Grid 100%
• Test Structure 100%
• Tapping Point 100%
• Metal Layer 33%
• Mechanical Stress 33%
• Constant Voltage 33%