Electromechanical properties and acoustic response of integrated PZT thin films

C. R. Cho; L. F. Francis

doi:10.1023/A:1006744027172

Electromechanical properties and acoustic response of integrated PZT thin films

C. R. Cho
, L. F. Francis

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Piezoelectric coefficient enhancement of Pb(Zr_xTi_1-x)O₃ (PZT) thin films effect their acoustic detection capabilities. PZT films were prepared by a sol-gel route on platinized silicon substrates using a range of thermal annealing conditions. The surface properties of the film were determined using X-ray diffraction and scanning electron microscopy.The acoustic response of the films under different conditions are experimentally studied.

Original language	English (US)
Pages (from-to)	1477-1479
Number of pages	3
Journal	Journal of Materials Science Letters
Volume	19
Issue number	16
DOIs	https://doi.org/10.1023/A:1006744027172
State	Published - Aug 2000

Bibliographical note

Funding Information:
This work was supported by the Office of Naval Research (N00014-95-1-0539) and the Whitaker Foundation. The authors wish to thank D. E. Drinkwater and A. Schmidt for their assistance with measurements, and Prof. D. L. Polla for helpful discussions.

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10.1023/A:1006744027172

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abstract = "Piezoelectric coefficient enhancement of Pb(ZrxTi1-x)O3 (PZT) thin films effect their acoustic detection capabilities. PZT films were prepared by a sol-gel route on platinized silicon substrates using a range of thermal annealing conditions. The surface properties of the film were determined using X-ray diffraction and scanning electron microscopy.The acoustic response of the films under different conditions are experimentally studied.",

author = "Cho, \{C. R.\} and Francis, \{L. F.\}",

note = "Funding Information: This work was supported by the Office of Naval Research (N00014-95-1-0539) and the Whitaker Foundation. The authors wish to thank D. E. Drinkwater and A. Schmidt for their assistance with measurements, and Prof. D. L. Polla for helpful discussions.",

year = "2000",

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AU - Francis, L. F.

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PY - 2000/8

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N2 - Piezoelectric coefficient enhancement of Pb(ZrxTi1-x)O3 (PZT) thin films effect their acoustic detection capabilities. PZT films were prepared by a sol-gel route on platinized silicon substrates using a range of thermal annealing conditions. The surface properties of the film were determined using X-ray diffraction and scanning electron microscopy.The acoustic response of the films under different conditions are experimentally studied.

AB - Piezoelectric coefficient enhancement of Pb(ZrxTi1-x)O3 (PZT) thin films effect their acoustic detection capabilities. PZT films were prepared by a sol-gel route on platinized silicon substrates using a range of thermal annealing conditions. The surface properties of the film were determined using X-ray diffraction and scanning electron microscopy.The acoustic response of the films under different conditions are experimentally studied.

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JO - Journal of Materials Science Letters

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ER -

Electromechanical properties and acoustic response of integrated PZT thin films

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