Electromechanical properties and acoustic response of integrated PZT thin films

C. R. Cho, L. F. Francis

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Piezoelectric coefficient enhancement of Pb(ZrxTi1-x)O3 (PZT) thin films effect their acoustic detection capabilities. PZT films were prepared by a sol-gel route on platinized silicon substrates using a range of thermal annealing conditions. The surface properties of the film were determined using X-ray diffraction and scanning electron microscopy.The acoustic response of the films under different conditions are experimentally studied.

Original languageEnglish (US)
Pages (from-to)1477-1479
Number of pages3
JournalJournal of Materials Science Letters
Issue number16
StatePublished - Aug 2000

Bibliographical note

Funding Information:
This work was supported by the Office of Naval Research (N00014-95-1-0539) and the Whitaker Foundation. The authors wish to thank D. E. Drinkwater and A. Schmidt for their assistance with measurements, and Prof. D. L. Polla for helpful discussions.


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