Efficient kinetic approach to the modeling of the electron distribution function in low-pressure high-density plasma tools

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The efficient modeling of the electron component of low pressure plasma is discussed. The typically non-Maxwellian character of the electron distribution function (EDF) and the kinetic character of the different heating mechanisms requires a kinetic treatment which adds additional `energy' dimension to the number of spatial dimension considered in other modules of the model. The approach uses a `hybrid' model to the solution of the Boltzmann equation. This approach uses different approximations for different energy ranges of the EDF. The high energy `tail' region of the EDF is determined by the solution of the complete, multidimensional Boltzmann equation.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Plasma Science
Editors Anon
PublisherIEEE
Pages175
Number of pages1
StatePublished - 1998
EventProceedings of the 1998 IEEE International Conference on Plasma Science - Raleigh, NC, USA
Duration: Jun 1 1998Jun 4 1998

Other

OtherProceedings of the 1998 IEEE International Conference on Plasma Science
CityRaleigh, NC, USA
Period6/1/986/4/98

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