Efficient kinetic approach to the modeling of the electron distribution function in low-pressure high-density plasma tools

The efficient modeling of the electron component of low pressure plasma is discussed. The typically non-Maxwellian character of the electron distribution function (EDF) and the kinetic character of the different heating mechanisms requires a kinetic treatment which adds additional `energy' dimension to the number of spatial dimension considered in other modules of the model. The approach uses a `hybrid' model to the solution of the Boltzmann equation. This approach uses different approximations for different energy ranges of the EDF. The high energy `tail' region of the EDF is determined by the solution of the complete, multidimensional Boltzmann equation.