Abstract
The efficient modeling of the electron component of low pressure plasma is discussed. The typically non-Maxwellian character of the electron distribution function (EDF) and the kinetic character of the different heating mechanisms requires a kinetic treatment which adds additional `energy' dimension to the number of spatial dimension considered in other modules of the model. The approach uses a `hybrid' model to the solution of the Boltzmann equation. This approach uses different approximations for different energy ranges of the EDF. The high energy `tail' region of the EDF is determined by the solution of the complete, multidimensional Boltzmann equation.
| Original language | English (US) |
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| Title of host publication | IEEE International Conference on Plasma Science |
| Editors | Anon |
| Publisher | IEEE |
| Pages | 175 |
| Number of pages | 1 |
| State | Published - 1998 |
| Event | Proceedings of the 1998 IEEE International Conference on Plasma Science - Raleigh, NC, USA Duration: Jun 1 1998 → Jun 4 1998 |
Other
| Other | Proceedings of the 1998 IEEE International Conference on Plasma Science |
|---|---|
| City | Raleigh, NC, USA |
| Period | 6/1/98 → 6/4/98 |