The efficiency of energy conversion by piezoelectric devices depends upon the quality factor Q and electromechanical coupling coefficient k 2. In this study the efficiency Q and k 2 are measured for a piezoelectric cantilever, a piezoelectric stack, and a micromachined piezoelectric membrane. The experimental values are compared to a model which predicts efficiency at resonance in terms of k 2 and Q. Results of the experiment and model are within 2% of each other.
Bibliographical noteFunding Information:
The authors gratefully acknowledge the support provided by DARPA MTO's MicroPower Generation Program and the US Army SMDC under Contract No. DASG60–02–C0001.