Abstract
The efficiency of energy conversion by piezoelectric devices depends upon the quality factor Q and electromechanical coupling coefficient k 2. In this study the efficiency Q and k 2 are measured for a piezoelectric cantilever, a piezoelectric stack, and a micromachined piezoelectric membrane. The experimental values are compared to a model which predicts efficiency at resonance in terms of k 2 and Q. Results of the experiment and model are within 2% of each other.
Original language | English (US) |
---|---|
Article number | 104107 |
Journal | Applied Physics Letters |
Volume | 89 |
Issue number | 10 |
DOIs | |
State | Published - 2006 |
Bibliographical note
Funding Information:The authors gratefully acknowledge the support provided by DARPA MTO's MicroPower Generation Program and the US Army SMDC under Contract No. DASG60–02–C0001.