Effects of annealing on the structure of Ta2N thin films deposited on Al2O3

James E. Angelo, N. R. Moody, S. K. Venkataraman, W. W. Gerberich

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Fingerprint Dive into the research topics of 'Effects of annealing on the structure of Ta<sub>2</sub>N thin films deposited on Al<sub>2</sub>O<sub>3</sub>'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy