Keyphrases
RF Plasma
100%
Film Morphology
100%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
100%
Diamond Film
100%
Surface Species
100%
Species Concentration
100%
Inductively Coupled
100%
Temperature Effect
66%
Substrate Temperature
66%
Acetylene
33%
X Ray Diffraction
33%
Atmospheric Pressure
33%
Gas Composition
33%
Hydrogen Recombination
33%
Atomic Hydrogen
33%
Gas Chromatograph
33%
Texture Analysis
33%
Growth Areas
33%
Hydrogen Ratio
33%
Methane Flow
33%
Methane-hydrogen Mixture
33%
Engineering
Diamond
100%
Chemical Vapor Deposition
100%
Methane
100%
Substrate Temperature
66%
Flow Rate
33%
Ray Diffraction
33%
Atomic Hydrogen
33%
Growth Surface
33%
Temperature Dependence
33%
Gas Composition
33%
Texture Analysis
33%
Flow Velocity
33%
Atmospheric Pressure
33%
Material Science
Chemical Vapor Deposition
100%
Film
100%
Surface (Surface Science)
100%
Diamond Films
100%
Scanning Electron Microscopy
33%
X-Ray Diffraction
33%
Phase Composition
33%