Effect of surface species concentrations and temperature on diamond film morphology in inductively coupled r.f. plasma CVD

J. W. Lindsay, J. M. Larson, S. L. Girshick

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Diamond films were deposited with an r.f. plasma operating at atmospheric pressure. The gas composition above the growth surface was measured with a gas chromatograph. Experiments were conducted over a range of methane flow rates and substrate temperatures. Films were characterized by SEM and X-ray diffraction texture analysis. Increases in either input methane-hydrogen ratio or substrate temperature caused film morphology to shift from {111} toward {100} faceting, while the measured ratio of CH4 to C2H2 decreased. We speculate that the temperature effect on species concentrations and film morphology is due to the temperature dependence of surface-catalyzed atomic hydrogen recombination.

Original languageEnglish (US)
Pages (from-to)481-485
Number of pages5
JournalDiamond and Related Materials
Volume6
Issue number2-4
DOIs
StatePublished - Mar 1997

Bibliographical note

Funding Information:
This work was partially supported by NSF grant CTS-9424271, by the Engineering Research Center on Plasma-Aided Manufacturing ( ECD-87-21545 ), and by the Minnesota Supel"comp~qer Institute. Assistance with X-ray texture analysis from Dr. Linda Sauer at the University of Minnesota and Dr. Brock Alexander at the Naval Research Laboratory is gratefully acknowledged.

Keywords

  • Diamond films
  • Morphology
  • Plasma
  • r.f.

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