Effect of surface roughness on the secondary ion yield in ion sputtering

Maxim Makeev, Albert László Barabási

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

There is extensive experimental evidence that, at low temperatures, surface erosion by ion bombardment roughens the sputtered substrate, leading to a self-affine surface. These changes in the surface morphology also modify the secondary ion yield. Here, we calculate analytically the secondary ion yield in terms of parameters characterizing the sputtering process and the interface roughness.

Original languageEnglish (US)
Pages (from-to)2209-2211
Number of pages3
JournalApplied Physics Letters
Volume73
Issue number15
DOIs
StatePublished - Dec 1 1998

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