Effect of Sputtering Powers on Mg and Ga Co-Doped ZnO Thin Films with Transparent Conducting Characteristics

In Young Kim, Seung Wook Shin, Min Sung Kim, Jae Ho Yun, Gi Seok Heo, Chae Hwan Jeong, Jong Ha Moon, Jeong Yong Lee, Jin Hyoek Kim

Research output: Contribution to journalArticle

Abstract

ZnO thin films co-doped with Mg and Ga (MxGyZzO, x + y + z = 1, x = 0.05, y = 0.02 and z = 0.93) were prepared on glass substrates by RF magnetron sputtering with different sputtering powers ranging from 100W to 200W at a substrate temperature of 350 oC. The effects of the sputtering power on the structural, morphological, electrical, and optical properties of MGZO thin films were investigated. The X-ray diffraction patterns showed that all the MGZO thin films were grown as a hexagonal wurtzite phase with the preferred orientation on the c-axis without secondary phases such as MgO, Ga2O3, or ZnGa2O4. The intensity of the diffraction peak from the (0002) plane of the MGZO thin films was enhanced as the sputtering power increased. The (0002) peak positions of the MGZO thin films was shifted toward, a high diffraction angle as the sputtering power increased. Cross-sectional field emission scanning electron microscopy images of the MGZO thin films showed that all of these films had a columnar structure and their thickness increased with an increase in the sputtering power. MGZO thin film deposited at the sputtering power of 200W showed the best electrical characteristics in terms of the carrier concentration (4.71 x 1020 cm-3), charge carrier mobility (10.2 cm2 V-1 s-1) and a minimum resistivity (1.3 x 10-3ωcm). A UVvisible spectroscopy assessment showed that the MGZO thin films had high transmittance of more than 80 % in the visible region and that the absorption edges of MGZO thin films were very sharp and shifted toward the higher wavelength side, from 270 nm to 340 nm, with an increase in the sputtering power. The band-gap energy of MGZO thin films was widened from 3.74 eV to 3.92 eV with the change in the sputtering power.

Original languageEnglish (US)
Pages (from-to)155-160
Number of pages6
JournalKorean Journal of Materials Research
Volume23
Issue number3
DOIs
StatePublished - 2013

Keywords

  • Mg and Ga co-doped ZnO (MGZO)
  • Quaternary compounds
  • RF magnetron sputtering technique
  • Transparent conductive oxide (TCO)
  • Wide band gap energy.

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  • Cite this

    Kim, I. Y., Shin, S. W., Kim, M. S., Yun, J. H., Heo, G. S., Jeong, C. H., Moon, J. H., Lee, J. Y., & Kim, J. H. (2013). Effect of Sputtering Powers on Mg and Ga Co-Doped ZnO Thin Films with Transparent Conducting Characteristics. Korean Journal of Materials Research, 23(3), 155-160. https://doi.org/10.3740/MRSK.2013.23.3.155