Effect of Mask Erosion on Patterning of FePt for Heat-Assisted Magnetic Recording Media Using Embedded Mask Patterning

Keyphrases

• Heat-assisted Magnetic Recording 100%
• Magnetic Recording Media 100%
• FePt 100%
• Grain Size 66%
• Etching Process 66%
• Etching Rate 66%
• Hard Mask 66%
• FePt Media 66%
• Methanol 33%
• Small Grains 33%
• Underlying Layer 33%
• Sub-10 Nm 33%
• Areal Density 33%
• Reactive Ion Etching 33%
• Chemical Etching 33%
• Two-level 33%
• Non-uniformity 33%
• Magnetic Recording 33%
• Density Level 33%
• Pattern-based Approach 33%
• L10-FePt 33%
• Ion Sputtering 33%
• Sputtering Yield 33%
• Etch Selectivity 33%
• Space Distribution 33%
• Atomic Weight 33%
• High Aspect Ratio Features 33%
• Gas Chemistry 33%
• Rate-based Model 33%
• Ru(II) Complexes 33%

Material Science

• Grain Size 100%
• Magnetic Recording Medium 100%
• Density 25%