Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO

A. Strojny, E. T. Lilleodden, G. Wang, J. V. Sivertsen, W. W. Gerberich

Research output: Chapter in Book/Report/Conference proceedingChapter

Fingerprint

Dive into the research topics of 'Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds