Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO

A. Strojny, E. T. Lilleodden, G. Wang, J. V. Sivertsen, W. W. Gerberich

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Diamond-Like Carbon films with thicknesses controlled in the 10 to 100 nm range were sputter-deposited on single crystals of MgO. The substrates were prepared with varying roughness from 5 to 50 nm and varying surface dislocation densities from 100 to 2000 disl./μm2. Mechanical properties of the film and film-substrate interactions were investigated with an atomic force microscope retrofitted with a diamond indenter. The load bearing capacity of the substrate increased with increasing film thickness. As the indenter approached the film-substrate interface, load excursions occurred for the thinner films. No excursion was found for the thick film. Load excursions may be attributed to dislocations nucleating at the interface and/or film delamination.

Original languageEnglish (US)
Title of host publicationThin Films
Subtitle of host publicationStresses and Mechanical Properties VI
EditorsW.W. Gerberich, H. Gao, J.E. Sundgren, S.P. Baker
StatePublished - Dec 1 1996
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 8 1996Apr 11 1996

Publication series

NameMaterials Research Society Symposium - Proceedings
Volume436
ISSN (Print)0272-9172

Other

OtherProceedings of the 1996 MRS Spring Meeting
CitySan Francisco, CA, USA
Period4/8/964/11/96

Fingerprint

surface treatment
Film thickness
Surface treatment
film thickness
Substrates
Diamond like carbon films
Diamond
diamonds
Bearing capacity
Thick films
Delamination
Loads (forces)
Diamonds
Microscopes
Surface roughness
thick films
Single crystals
Thin films
roughness
Mechanical properties

Cite this

Strojny, A., Lilleodden, E. T., Wang, G., Sivertsen, J. V., & Gerberich, W. W. (1996). Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO. In W. W. Gerberich, H. Gao, J. E. Sundgren, & S. P. Baker (Eds.), Thin Films: Stresses and Mechanical Properties VI (Materials Research Society Symposium - Proceedings; Vol. 436).

Effect of film thickness and substrate surface treatment on substrate deformation : DLC on MgO. / Strojny, A.; Lilleodden, E. T.; Wang, G.; Sivertsen, J. V.; Gerberich, W. W.

Thin Films: Stresses and Mechanical Properties VI. ed. / W.W. Gerberich; H. Gao; J.E. Sundgren; S.P. Baker. 1996. (Materials Research Society Symposium - Proceedings; Vol. 436).

Research output: Chapter in Book/Report/Conference proceedingChapter

Strojny, A, Lilleodden, ET, Wang, G, Sivertsen, JV & Gerberich, WW 1996, Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO. in WW Gerberich, H Gao, JE Sundgren & SP Baker (eds), Thin Films: Stresses and Mechanical Properties VI. Materials Research Society Symposium - Proceedings, vol. 436, Proceedings of the 1996 MRS Spring Meeting, San Francisco, CA, USA, 4/8/96.
Strojny A, Lilleodden ET, Wang G, Sivertsen JV, Gerberich WW. Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO. In Gerberich WW, Gao H, Sundgren JE, Baker SP, editors, Thin Films: Stresses and Mechanical Properties VI. 1996. (Materials Research Society Symposium - Proceedings).
Strojny, A. ; Lilleodden, E. T. ; Wang, G. ; Sivertsen, J. V. ; Gerberich, W. W. / Effect of film thickness and substrate surface treatment on substrate deformation : DLC on MgO. Thin Films: Stresses and Mechanical Properties VI. editor / W.W. Gerberich ; H. Gao ; J.E. Sundgren ; S.P. Baker. 1996. (Materials Research Society Symposium - Proceedings).
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