@inbook{de5f6af4b1d048a5b723e4190190a1d3,
title = "Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO",
abstract = "Diamond-Like Carbon films with thicknesses controlled in the 10 to 100 nm range were sputter-deposited on single crystals of MgO. The substrates were prepared with varying roughness from 5 to 50 nm and varying surface dislocation densities from 100 to 2000 disl./μm2. Mechanical properties of the film and film-substrate interactions were investigated with an atomic force microscope retrofitted with a diamond indenter. The load bearing capacity of the substrate increased with increasing film thickness. As the indenter approached the film-substrate interface, load excursions occurred for the thinner films. No excursion was found for the thick film. Load excursions may be attributed to dislocations nucleating at the interface and/or film delamination.",
author = "A. Strojny and Lilleodden, {E. T.} and G. Wang and Sivertsen, {J. V.} and Gerberich, {W. W.}",
year = "1996",
month = jan,
day = "1",
doi = "10.1557/proc-436-281",
language = "English (US)",
series = "Materials Research Society Symposium - Proceedings",
booktitle = "Thin Films",
note = "Proceedings of the 1996 MRS Spring Meeting ; Conference date: 08-04-1996 Through 11-04-1996",
}