Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO

A. Strojny, E. T. Lilleodden, G. Wang, J. V. Sivertsen, W. W. Gerberich

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Diamond-Like Carbon films with thicknesses controlled in the 10 to 100 nm range were sputter-deposited on single crystals of MgO. The substrates were prepared with varying roughness from 5 to 50 nm and varying surface dislocation densities from 100 to 2000 disl./μm2. Mechanical properties of the film and film-substrate interactions were investigated with an atomic force microscope retrofitted with a diamond indenter. The load bearing capacity of the substrate increased with increasing film thickness. As the indenter approached the film-substrate interface, load excursions occurred for the thinner films. No excursion was found for the thick film. Load excursions may be attributed to dislocations nucleating at the interface and/or film delamination.

Original languageEnglish (US)
Title of host publicationThin Films
Subtitle of host publicationStresses and Mechanical Properties VI
DOIs
StatePublished - Jan 1 1996
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 8 1996Apr 11 1996

Publication series

NameMaterials Research Society Symposium - Proceedings
Volume436
ISSN (Print)0272-9172

Other

OtherProceedings of the 1996 MRS Spring Meeting
CitySan Francisco, CA, USA
Period4/8/964/11/96

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