The effect of chamber wall conditions on the gas phase composition of a Cl2 plasma was studied in an inductively coupled plasma reactor. Gas phase Cl and Cl2 concentrations were determined by optical emission spectroscopy in conjunction with actinometry. Overall, the results highlight the importance of controlling the chamber wall conditions and its significant effects on the plasma composition.
|Original language||English (US)|
|Number of pages||10|
|Journal||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|State||Published - Jan 2002|