ECS Transactions: Preface

M. Öztürk; H. Iwai; D. L. Kwong; P. J. Timans; E. P. Gusev; S. J. Koester; F. Roozeboom

ECS Transactions: Preface

M. Öztürk
, H. Iwai
, D. L. Kwong
, P. J. Timans
, E. P. Gusev
, S. J. Koester
, F. Roozeboom

Electrical and Computer Engineering

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	iii
Journal	ECS Transactions
Volume	6
Issue number	1
State	Published - 2007
Event	International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3 - 211th ECS Meeting - Chicago, IL, United States Duration: May 6 2007 → May 10 2007

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@article{062d4c9bfe194a03a4072cf3a30f7069,

title = "ECS Transactions: Preface",

author = "M. {\"O}zt{\"u}rk and H. Iwai and Kwong, \{D. L.\} and Timans, \{P. J.\} and Gusev, \{E. P.\} and Koester, \{S. J.\} and F. Roozeboom",

year = "2007",

language = "English (US)",

volume = "6",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Institute of Physics",

number = "1",

note = "International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3 - 211th ECS Meeting ; Conference date: 06-05-2007 Through 10-05-2007",

}

TY - JOUR

T1 - ECS Transactions

T2 - International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3 - 211th ECS Meeting

AU - Öztürk, M.

AU - Iwai, H.

AU - Kwong, D. L.

AU - Timans, P. J.

AU - Gusev, E. P.

AU - Koester, S. J.

AU - Roozeboom, F.

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/45849096865

UR - https://www.scopus.com/pages/publications/45849096865#tab=citedBy

M3 - Editorial

AN - SCOPUS:45849096865

SN - 1938-5862

VL - 6

SP - iii

JO - ECS Transactions

JF - ECS Transactions

IS - 1

Y2 - 6 May 2007 through 10 May 2007

ER -

ECS Transactions: Preface

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