Dry thermal oxidation of a graded SiGe layer

Y. S. Lim, J. S. Jeong, J. Y. Lee, H. S. Kim, H. K. Shon, H. K. Kim, D. W. Moon

Research output: Contribution to journalArticlepeer-review

22 Scopus citations
Original languageEnglish (US)
Pages (from-to)3606
Number of pages1
JournalApplied Physics Letters
Issue number22
StatePublished - Nov 26 2001

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