Double-Patterned Sidewall Directed Self-Assembly and Pattern Transfer of Sub-10 nm PTMSS-b-PMOST
- Julia Cushen
- , Lei Wan
- , Gregory Blachut
- , Michael J. Maher
- , Thomas R. Albrecht
- , Christopher J. Ellison
- , C. Grant Willson
- , Ricardo Ruiz
Research output: Contribution to journal › Article › peer-review
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