Double-Patterned Sidewall Directed Self-Assembly and Pattern Transfer of Sub-10 nm PTMSS-b-PMOST

Julia Cushen, Lei Wan, Gregory Blachut, Michael J. Maher, Thomas R. Albrecht, Christopher J. Ellison, C. Grant Willson, Ricardo Ruiz

Research output: Contribution to journalArticlepeer-review

56 Scopus citations

Fingerprint

Dive into the research topics of 'Double-Patterned Sidewall Directed Self-Assembly and Pattern Transfer of Sub-10 nm PTMSS-b-PMOST'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds