Does chemistry really matter in the chemical vapor deposition of titanium dioxide? Precursor and kinetic effects on the microstructure of polycrystalline films

Charles J. Taylor, David C. Gilmer, Daniel G. Colombo, G. D. Wilk, Stephen A. Campbell, Jeff Roberts, Wayne L. Gladfelter

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155 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Medicine & Life Sciences