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Directed self-assembly of silicon-containing block copolymer thin films

  • Michael J. Maher
  • , Charles T. Rettner
  • , Christopher M. Bates
  • , Gregory Blachut
  • , Matthew C. Carlson
  • , William J. Durand
  • , Christopher J. Ellison
  • , Daniel P. Sanders
  • , Joy Y. Cheng
  • , C. Grant Willson

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Material Science